Pattern inspection device
Detects foreign objects and defects by comparing with the master image! A system equipped with automatic position correction and area-specific specification setting functions.
This product is a system that accurately distinguishes by registering a normal surface as a master and comparing it with inspection images. By comparing with the registered image, it detects foreign objects, scratches, dirt, and pattern defects attached to the image surface. It performs alignment deviation inspection and dimensional inspection using the display of the alignment pattern's position, measuring the area and size (maximum diameter) of foreign objects, and distinguishing between good and defective products. The inspection result data is filed and accumulated. Additionally, it allows for full surface movement inspection in conjunction with a prober (or XY stage) and automatic correction of positional deviations. 【Features】 - Automatic correction of positional deviations between master images and inspection images - Individual judgment conditions can be set for different screen areas (up to 10 specs) - Supports detection of foreign objects, scratches, dirt, and pattern defects, as well as dimensional inspection - Inspection result data is filed and saved - Full surface movement inspection in conjunction with a prober (or XY stage) *For more details, please download the PDF or feel free to contact us.
- Company：アローズエンジニアリング
- Price：Other
